Power coupling and plasma parameters of low-pressure microwave argon discharges in capillaries: comparison between surfatron and striplastron launchers
O. Leroy, F. Coquery, T. Minea, and G.D. Stancu – Vacuum, Volume 252, September 2026, 115429
This article presents a comparison of the macroscopic characterizations of continuous microwave-generated plasmas from surface waves in dielectric capillary tubes (internal diameter of the order of 1 mm), using two different exciters: a surfatron and a striplastron. Parameters such as coupled power fraction, power density, and plasma length are determined as a function of injected microwave power (0-50 W), microwave frequency (2.4-2.5 GHz), and gas flow rate (300-700 ml/min). All characterizations are performed in argon micro-discharges operating in a low-pressure gas flow (1-600 mbar). https://doi.org/10.1016/j.vacuum.2026.115429